The US Department of Commerce on Friday announced its awards for Samsung, Texas Instruments and Amkor Technology under the CHIPS Incentives Program, which will reach more than $6.75 billion in total. The program is intended to help expand domestic semiconductor production. Samsung was awarded up to $4.745 billion in direct funding – a smaller amount than the which was announced earlier this year – while up to $1.61 billion and Amkor up to $407 million.

Samsung plans to invest $37 billion over the next few years to ramp up chip development and production in the US, the DOC said. The company will expand its operations in Texas to include two new production facilities and an area for research and development. It also plans to expand an existing facility in Austin. Texas Instruments is working to build three new facilities — two in Texas and one in Utah — saying it will invest more than $18 billion through 2029. Amkor plans a $2 billion investment to develop advanced packaging and a test facility in Peoria, Arizona. According to it is the country’s largest facility of its kind.

The Commerce Department said the awards will be given as the companies complete certain project milestones. It expects the funding to support the creation of thousands of jobs per project.